This means the next step in excimer evolution: a compact state-of-the-art excimer laser with both, good static and dynamic gas lifetimes, consume only small amounts of gas, even when used at high-duty cycles. Small, integrated gas cylinder bottles are sufficient to fuel such lasers for months of operation. For the first time, a fully integrated, single cabinet excimer laser with no need for external gas connections is available. Only power and control lines are external to the unit. That means there are no extra cooling devices, no hazardous and inconvenient handling of external halogen gases and manifolds - just pure deep-UV performance from an electricity socket. Coherent has also created the innovative Xantos XS series of compact excimer lasers that comply with all major safety standards. The Xantos XS includes the following main features: