LPXpro is a family of RoHS compliant excimer lasers, offered at wavelengths of 193, 248, 308 and 351 nm, with output powers as high as 90W at 248 nm. The LPFpro family expands wavelength range to vacuum UV with 157 nm. The beam quality, high pulse energy, short pulse length and high peak power of LPXpro and LPFpro lasers combine to optimize UV applications. These characteristics, plus their proven reliability and low cost of ownership make LPXpro lasers suitable for a wide range of demanding, high-precision processing tasks. These include drilling, pulsed laser deposition (PLD), laser direct patterning (LDP), laser lift off (LLO) and cleaning.